7、Evanescent wave fiber-optic sensors (EWFS) with acicular encapsulation were fabricated using silicon photolithography technology and silica wet-etching technology.
11、This paper introduces a fabricated method of using fused silica as the chip material. It includes standard photolithography, wet chemical etching and bonding techniques.
3、The business unit's capabilities including photolithography, micro-etch and small scale thermal dissipation technology.
8、In this paper, the principle, construction and function of a new near photolithography system for manufacturing circular gratings are introduced.
1、A picture made by photolithography.
6、The microchannels were firstly constructed on a glass substrate by standard UV photolithography and wet etching technique.
2、Spherical aberration can damage image quality in photolithography.
10、The most prevalent procedure is to use photolithography or electron-beam lithography to produce a pattern in a layer of photoresist on the surface of a silicon wafer.
9、Premium Wafer - A wafer that can be used for particle counting, measuring pattern resolution in the photolithography process, and metal contamination monitoring.
12、The third part is to use the sputtering, photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the PCR reaction.
5、The prototype of the micro actuator is fabricated by means of micro electroforming and SU-8 photolithography techniques.
4、The patterned anodic aluminum oxide (AAO) template was fabricated by UV-photolithography.
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