Test methods of precious metal pastes used for thick film microelectronics--Determination of sheet resistance
sheet resistance measurement
Test method for measuring resistivity of semiconductor silicon or sheet resistance of semiconductor films with a noncontact eddy-current gage
In this article, we drive the equations of measuring resistivity and surface sheet resistance, taking into account the contact dimension and putting the location of the four probes arbitrary.
" Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array"
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